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Mar 24, 2023
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CHEE 6321 - Nano Design & FabricationCr. 3. (3-0) Prerequisite: ECE 6320 or CHEE 6320 or MECE 6320 or consent of instructor. Design and fabrication at the nanoscale. Effects of nanoscale phenomena on device scaling; technological advantages and challenges. Design, fabrication, metrology, and devices integration at nanoscale.
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