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Apr 17, 2024
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ECE 6309 - Microlithography for Micro-and Nano-system ManufacturingCr. 3. (3-0) Prerequisite: Graduate standing and/or consent of the instructor. Fundamental principles of microlithography: resolution limits, resist exposure and development, and modeling; electron-beam, imprint, x-ray, and ion-beam lithography.
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