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Mar 29, 2024
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CHEE 7387 - Plasma Proc:Principles & ApplCredit Hours: 3.0 Lecture Contact Hours: 3 Lab Contact Hours: 0 Prerequisite: graduate standing in engineering or natural sciences or consent of instructor.
Principles of low pressure glow discharge plasmas: plasma generation and maintenance, plasma chemistry, plasma diagnostics. Applications with emphasis on semiconductor manufacturing.
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