May 25, 2022  
2019-2020 Graduate Catalog 
    
2019-2020 Graduate Catalog [Not Current Academic Year. Consult with Your Academic Advisor for Your Catalog Year]

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CHEE 7387 - Plasma Proc:Principles & Appl

Credit Hours: 3.0
Lecture Contact Hours: 3   Lab Contact Hours: 0
Prerequisite: graduate standing in engineering or natural sciences or consent of instructor.

Principles of low pressure glow discharge plasmas: plasma generation and maintenance, plasma chemistry, plasma diagnostics. Applications with emphasis on semiconductor manufacturing.



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