Mar 28, 2024  
2019-2020 Undergraduate Catalog 
    
2019-2020 Undergraduate Catalog [Not Current Academic Year. Consult with Your Academic Advisor for Your Catalog Year]

Add to Portfolio (opens a new window)

CHEE 5387 - Plasma Processing: Principles and Applications

Credit Hours: 3.0
Lecture Contact Hours: 3    Lab Contact Hours: 0
Prerequisite: senior standing in engineering or natural sciences or consent of instructor.
Description
Principles of low pressure glow discharge plasmas: plasma generation and maintenance, plasma chemistry, plasma diagnostics. Applications with emphasis on semiconductor manufacturing.



Add to Portfolio (opens a new window)