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Jun 07, 2023
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MECE 5321 - Nanoscale Design & FabricationCredit Hours: 3.0 Lecture Contact Hours: 3 Lab Contact Hours: 0 Formerly MECE 5321 Design and Fabrication of Nanoscale Devices Prerequisite: ECE 5320 or CHEE 5320 or MECE 5320 , concurrent enrollment in MECE 5121 , or consent of instructor. Description Design and fabrication at the nanoscale. Effects of nanoscale phenomena on device scaling; technological advantages and challenges. Design, fabrication, metrology, and device integration at nanoscale.
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