Oct 05, 2024  
2015-2016 Undergraduate Catalog 
    
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2015-2016 Undergraduate Catalog [Not Current Academic Year. Consult with Your Academic Advisor for Your Catalog Year]

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CHEE 5387 - Plasma Processing: Principles and Applications

Credit Hours: 3.0
Lecture Contact Hours: 3    Lab Contact Hours: 0
Prerequisite: senior standing in engineering or natural sciences or consent of instructor.

Principles of low pressure glow discharge plasmas: plasma generation and maintenance, plasma chemistry, plasma diagnostics. Applications with emphasis on semiconductor manufacturing.


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