Apr 30, 2025  
2018-2019 Graduate Catalog 
    
Catalog Navigation
  Publication Home
  Catalog Definitions & Numbering
  Academic Calendar
  University Profile
  Admission & Registration
  Tuition & Fees
  Scholarships & Financial Aid
  Policies
  Programs & Degrees
  Courses
  Libraries
  Student Handbook
  Campus Map

  Graduate School
  Architecture & Design
  The Arts
  Business
  Education
  Engineering
  Hotel and Restaurant Management
  Law Center
  Liberal Arts & Social Sciences
  Natural Sciences & Mathematics
  Nursing
  Optometry
  Pharmacy
  Public Affairs
  Social Work
  Technology

  Publication Updates
  Publication Disclaimer
  Archives
  Intellectual Property
  My Portfolio
HELP
2018-2019 Graduate Catalog [Not Current Academic Year. Consult with Your Academic Advisor for Your Catalog Year]

Facebook this Page (opens a new window)
Tweet this Page (opens a new window)
Add to Portfolio (opens a new window)

ECE 6309 - Microlithography for Micro-and Nano-system Manufacturing

Credit Hours: 3.0
Lecture Contact Hours: 3   Lab Contact Hours: 0
Prerequisite: Graduate standing and/or consent of the instructor.

Fundamental principles of microlithography: resolution limits, resist exposure and development, and modeling; electron-beam, imprint, x-ray, and ion-beam lithography.


Facebook this Page (opens a new window)
Tweet this Page (opens a new window)
Add to Portfolio (opens a new window)